EECS 670: Introduction to Semiconductor Processing (3)

An overview of various processes to fabricate semiconductor devices and integrated circuits. Topics covered include crystal growth, oxidation, solid-state diffusion, ion implantation, photolithography, chemical vapor deposition, epitaxial growth, metalization, and plasma etching of thin films. (Same as C&PE 655.) Prerequisite: Senior standing in C&PE or EECS, or consent of instructor. LEC
View current sections...