C&PE 655: Introduction to Semiconductor Processing (3)

An overview of various processes to fabricate semiconductor devices and integrated circuits. Topics covered include crystal growth, oxidation, solid-state diffusion, ion implantation, photolithography, chemical vapor deposition, epitaxial growth, metalization, and plasma etching of thin films. (Same as EECS 670.) Prerequisite: Senior standing in C&PE or EE or consent of instructor. LEC
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